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What We Offer

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MiNAN offers a range of micro/nano fabrication services which are done in-house at our MiNAN laboratory. We also offer professional consultancy if you need help optimizing your own manufacturing processes.

 

Our devices are chemically bonded with a combination of thermal bonding and solvent bonding techniques.​

  • Lithography

- Mask Alignment

- Stepper

- Direct Laser Writing

  • Micro-Injection Moulding

  • Electroforming

  • Etching

- RIE/DRIE/IBE​

  • High Aspect Ratio Structures

- SU-8

- Dry Film Resist (DFR)

  • Dicing

- Disco/Laser

  • COB packaging

  • Semiconductor Mask Fabrication

  • Characterization

  • Micro-Hot Embossing

  • Thermal Nanoimpriting

  • Thin Film Processing

- Sputter/PECVD/E-beam Evaporator

- Liftoff Process

- Metal - Ti, Al, Ni, Au, Ag, Cr, Pt, Cu, AlCu

- Nonmetal Poly Si, SiO2, SiNx, TiN, ITO

- Substrate: Si/Glass/Flexible Polymer​

  • Fabrication

  • Bonding

  • Characterization

  • Testing

  • ​Customized design consulting​

  • Numerical simulation and modelling

  • Scale-up production of laboratory prototypes

Moulding processes:

 

  • Variotherm assisted injection moulding

  • Vacuum venting 

  • Process monitoring

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