MEMS

SU8 Master 

SU8 is one of negative photoresist with good mechanical, dielectric, chemical resistant and thermal properties, and good biocompatibility. It can be used for fabrication of microfluidic chip for cell culture, molecular diagnostics etc. 

 

SU8 is also widely used as a mould for PDMS soft lithography chip fabrication 

MINAN provide SU master fabrication service:

1. SU8 Photolithogrpahy for fabrication master for PDMS casting on 2in~6in wafer

2. Multi-layer SU8 

3. Minimum line width 0.8um, maximum thickness 150um. 

We provide 1~2 weeks time fabrication service.